Dual metric OPC

ABSTRACT

A technique for creating mask layout data to print a desired pattern of features via a photolithographic process includes defining one or more subresolution assist features (SRAFs) and performing OPC on printing features and the added SRAF features.

FIELD OF THE INVENTION

The present invention relates to photolithographic processing and, inparticular, to methods of preparing layout data for the creation of oneor more photolithographic masks.

BACKGROUND

In conventional photolithographic processing, integrated circuits aremanufactured by exposing a pattern of features that are contained on amask or reticle onto a wafer. Light passing through the transparentportions of the mask activates light sensitive resist materials on thewafer that are then chemically and mechanically processed to create thecircuit features. The process continues building up the integratedcircuit, layer by layer.

As circuit features become increasingly small and more densely packed,optical and other process distortions occur such that the pattern offeatures on the mask does not correspond to how the features will printon the wafer. Therefore, numerous resolution enhancement techniques(RETs) have been developed to improve the ability of the mask to print adesired pattern on the wafer. One resolution enhancement technique isoptical and process correction (OPC). OPC operates by changing the maskpattern to precompensate for expected optical and process distortionssuch that a pattern of features printed on a wafer will match a desiredtarget layout pattern. Another resolution enhancement technique is theuse of subresolution assist features (SRAFs). Such features are smallfeatures placed on a mask or reticle that are too small to print on awafer but operate to improve how an adjacent mask feature prints.

Another technique for improving the ability of a mask to print a desiredpattern of features on a wafer is referred to as mask inversion. Withmask inversion, a mathematical calculation is performed to determinewhat an optimal mask pattern should look like in order to create adesired pattern on a wafer. One mask inversion technique is described inpublished U.S. patent application Ser. No. 11/364,802 by Yuri Granik andassigned to Mentor Graphics Corporation of Wilsonville, Oreg., theassignee of the present invention, and is herein incorporated byreference. While inverse techniques can accurately determine the idealmask pattern required to print a target pattern of features on a wafer,the methods can be computationally intensive.

Given these problems, there is need for a technique of improving theability of a mask to print a desired pattern of features on a wafer thatapproaches the accuracy of a mask inversion technique but is faster tocompute and easier to manufacture.

SUMMARY

The present invention is a technique for processing layout data for thecreation of one or more photolithographic masks. Layout data is receivedthat defines a number of polygons corresponding to features to becreated on a wafer. Polygons are fragmented to define a number ofprinting feature edge fragments. Subresolution assist features (SRAFs)are defined adjacent one or more of the printing features to improve theability of a mask to print the features on a wafer. The SRAFs arefragmented to define a number of SRAF edge fragments. One or more SRAFedge fragments are mapped to a printing feature edge fragment. OPC isperformed on the printing feature edge fragments and on the mapped SRAFedge fragments to improve the ability of the mask to print the desiredtarget pattern of features on a wafer.

This summary is provided to introduce a selection of concepts in asimplified form that are further described below in the DetailedDescription. This summary is not intended to identify key features ofthe claimed subject matter, nor is it intended to be used as an aid indetermining the scope of the claimed subject matter.

DESCRIPTION OF THE DRAWINGS

The foregoing aspects and many of the attendant advantages of thisinvention will become more readily appreciated as the same become betterunderstood by reference to the following detailed description, whentaken in conjunction with the accompanying drawings, wherein:

FIG. 1 illustrates a representative computer system with which thepresent invention can be implemented;

FIG. 2 illustrates a conventional method of placing SRAFs adjacent anOPC corrected mask feature;

FIG. 3 illustrates an OPC corrected mask feature and OPC corrected SRAFsin accordance with one embodiment of the present invention;

FIG. 4 illustrates mapping a number of SRAF edge fragments to a printingfeature edge fragment in accordance with one embodiment of the presentinvention;

FIG. 5 is a flow chart of steps performed in accordance with oneembodiment of the present invention;

FIG. 6 illustrates results of a mask inversion calculation, SRAFs placedto simulate the mask inversion, and OPC corrected SRAFs in accordancewith an embodiment of the present invention; and

FIG. 7 illustrates SRAFs to be cleaned from a mask layout.

DETAILED DESCRIPTION

As indicated above, the present invention is a system for improving theability of a mask to print a target pattern of features on a wafer witha photolithographic process. Although the present invention is describedwith respect to creating integrated circuits, it will be appreciatedthat the present invention can be used in photolithographic processes tocreate other devices such as microelectrical-mechanical systems (MEMS).

FIG. 1 illustrates one possible computing environment with which thepresent invention can be implemented. A desired target layout database20 stores a pattern of features to be created on a wafer. The targetpattern of features is generally determined by circuit designers to meetthe operation and performance characteristics of the particularintegrated circuit to be created. A computer system 30 receives a set ofexecutable instructions from a computer storage media 32 (CD-ROM, tape,DVD, flash memory, hard drive, etc.) or from a wired or wirelesscommunication link 34. The computer system 30 may be a standalone,networked, parallel processing, or other configuration known or laterdeveloped. The computer system 30 executes the instructions as will bedescribed in further detail below to create a set of mask data that willprint the target pattern of features on a wafer. The mask data isprovided to a mask writer 40 that creates one or more masks used in thephotolithographic printing process.

In one embodiment of the invention, the target layout database 20 is ahierarchical database that defines the pattern of features in a layoutdescription language such as GDS-II or OASIS™. In GDS-II and OASIS,features are defined as polygons that may be manipulated by the computersystem 30 to create the mask data that will ensure that the desiredfeature pattern is printed on a wafer. In some embodiments, the targetlayout database 20 stores the target layout pattern data in ahierarchical manner including data defining a number of cells that maybe reused in the integrated circuit. By storing the data hierarchically,the size of the layout database can be reduced.

FIG. 2 illustrates one conventional technique for enhancing theprintability of a feature. In this embodiment, the target feature to beprinted is a rectangle and the corresponding mask feature 50 isgenerally rectangular. Optical and other process distortions cause thefeature 50 to print a shape on the wafer that may differ substantiallyfrom its shape on the mask.

To correct for these distortions, the shape 50 is analyzed with anoptical and process correction (OPC) tool whereby the edges defining thefeature 50 are fragmented and analyzed to determine how the edgefragments will print on the wafer. Each edge fragment can be movedoutwards or inwards to precompensate for the expected opticaldistortions so that the feature printed on the wafer will match thedesired target feature.

Another commonly used resolution enhancement technique is to add one ormore subresolution assist features (SRAFs) 52, 54, 56, 58 to improve theability of the photolithographic system to print the target feature onthe wafer.

In conventional OPC, only the features that are printed on the wafer areOPC corrected. Any SRAFs added to a layout are not modified and remainas shown in FIG. 2. However, in accordance with one embodiment of thepresent invention, it has been determined that the ability to print adesired feature pattern on a wafer can be further improved if one ormore of the SRAFs 52 a, 54 a, 56 a, 58 a are also OPC corrected, asshown in FIG. 3.

FIG. 4 illustrates a target feature such as a square contact or via tobe created on a wafer. In the layout database, the via is defined by apolygon 70 having a number of vertices 72 that define the corners of thepolygon. Additional fragmentation points can be added to the polygon 70that defines the via for use in performing OPC. Surrounding the polygon70 are a number of SRAFs 80-94 positioned symmetrically around the sidesof the polygon 70.

In accordance with one embodiment of the invention, the SRAFs arefragmented thereby defining a number of SRAF edge fragments. Forexample, SRAF 80 is fragmented to include SRAF edge fragments 80 a-80 f.Similarly, SRAF 88 is fragmented to include a number of SRAF edgefragments 88 a-88 h. In one embodiment of the invention, each SRAF edgefragment within a search area 100 of a printing feature edge is linkedor mapped to the corresponding feature edge. In one embodiment, thesearch area extends outwards in one direction from the printing edgefeature. In another embodiment, the printing edge feature is positionedin the middle of the search area and any SRAF edge segment around theprinting edge feature is mapped to the printing edge feature.Alternatively, the search area could be user defined. For example, theSRAF edge segments of SRAFs 80 and 88 are mapped to an edge fragment 70a of the polygon 70. The search area 100 may be predefined or userselected and generally is set to be at least as large as the opticalradius of the photolithographic printing system to be used.

In accordance with one embodiment of the invention, the edge fragmentsof the polygon 70 are moved by an OPC program in order to improve thefidelity with which the feature printed on a wafer matches the targetfeature. In one embodiment of the invention, each edge fragment of theprinting features is analyzed to minimize its edge placement error(EPE). One suitable OPC program is the Calibre® program suite availablefrom Mentor Graphics of Wilsonville, Oreg. However, other OPC programscould be used.

In accordance with one embodiment of the present invention, one or moreof the SRAF edge fragments are also analyzed by the OPC program toimprove a second printing/imaging parameter of a linked printing edgefragment. In the example shown, SRAF edge fragments 80 a-80 f of SRAF 80and SRAF edge fragments 88 a-88 h of SRAF 88 are linked to the printingedge fragment 70 a and are analyzed to improve a second printing/imagingcharacteristic of a linked edge fragment 70 a.

In one embodiment of the invention, the second printing/imagingcharacteristic is different than that used by the OPC program todetermine the position of the printing edge fragments. In one embodimentof the invention, the SRAF edge fragments are analyzed and moved, ifnecessary, to improve the slope, image log slope, or contrast at thenominal dose and focus settings. Alternatively, the SRAF edge fragmentscan be analyzed and moved if necessary to improve the EPE, slope, imagelog slope or contrast of the printing edge fragment at an out offocus/dose conditions. In another alternative embodiment, combinationsof these printing/imaging characteristics could be used as the secondprinting/imaging characteristic.

Once the relationship between the movement of a mapped SRAF edgefragment and the second printing/imaging characteristic of the printingfeature is determined, the position of the SRAF edge fragments isadjusted by the OPC program to improve the second printing/imagingcharacteristic of the printing feature. In one embodiment of theinvention, the OPC program is a matrix-based system that analyzes theinfluence of a number of SRAF edge fragments on a linked edge fragmentunder consideration. In one embodiment, one or more matrices analyze theeffect of each mapped SRAF edge fragment to a corresponding edgefragment of a printing feature. With the Calibre program, the matrix OPCprogram returns the edge position error (EPE), slope, I_(max), I_(min),and curvature of the aerial image intensity at a printing thresholdintensity). In addition, the Calibre OPC program returns two values thatare unique to the linked edge fragments including (1) the mask errorfactor or MEEF, which is defined as the change in EPE for a printingedge versus the change in position of a linked edge and (2) slopefactor, which is defined as how much the slope changes for a printingedge versus a change in the position of each linked edge. From the twovalues, MEEF and slope factor, it can be determined if one or more ofthe SRAF edge fragments should be moved and in which direction in orderto improve the second printing/image characteristic of the mappedprinting edge fragment.

FIG. 5 is a flow chart illustrating the steps performed by oneembodiment of the present invention. Although the steps are described ina particular order, it will be appreciated that the steps could beperformed in a different order and still achieve the functionalitydescribed. Beginning at 150, a desired target layout or a portionthereof is obtained by a computer system. At 152, an initial placementof SRAFs is made adjacent to the features that benefit from them. In oneembodiment, SRAFs are placed in a separate layer of the layout database.The SRAFs may be placed by a rule or via a model as determined fromprevious experience or simulations. Alternatively, the SRAFs may beplaced manually by a circuit designer.

At 154, the polygons defining printing features of the layout and theSRAFs are fragmented. The SRAFs may be fragmented to have the same,smaller or larger sized edge fragments than those of the polygonscorresponding to the printing features. However, in one embodiment ofthe invention, the SRAFs are fragmented to have larger edge fragmentsthan those of the printing features. The fragmentation of the polygonscorresponding to printing features and the SRAFs may occur at the sametime or at different times.

At 156, the computer system determines which SRAF edge fragments arewithin a search distance of a printing feature edge fragment. As shownin FIG. 4, this may be accomplished by extending a circle outwards fromthe printing edge fragment and mapping/linking each SRAF edge fragmentwithin the circle to the printing edge fragment. At 158, the computersystem determines the relationship between a printing/imagingcharacteristic of a printing edge fragment versus a change in positionof the linked SRAF edge fragments.

At 160, OPC corrections are made to the printing edge fragments and theOPC corrections of the SRAF edge fragments that improve the selectedsecond printing/imaging parameter are also made. In one embodiment, allOPC changes are made at the same time. However, it is possible that allthe OPC corrections to the printing edge fragments could be made firstfollowed by all the OPC corrections for the SRAF edge fragments or viceversa. Alternatively, OPC changes to both the printing edge fragmentsand the SRAF edge fragments could be made in a portion of the integratedcircuit layout such as a tiled area.

At 162, the computer system checks to see that the SRAF edge fragmentshave not been made so large by the recommended OPC correction that theynow print on the wafer. If so, the SRAF edge fragments are preventedfrom defining an area larger than the maximum SRAF size to ensure thatthe SRAFs do not print on a wafer. Alternatively, the SRAFS may bealtered so that they no longer print by, for example, dividing an SRAFinto two or more smaller SRAFs or by removing a center portion of theSRAF etc. At 164, the computer system determines whether an SRAF edgefragment has been moved by an OPC correction to define an SRAF area thatis so small that it performs no function or has no practical benefit inthe mask layout. For example, SRAFs that are smaller than somepredetermined size contribute little to the printability of a printingfeature. Therefore, the SRAFs that are made too small by a recommendedOPC correction can be deleted from the mask layout. Alternatively, theSRAFs can be fixed at a minimum size by the computer and not allowed tobe made any smaller by an OPC correction. Step 164 is generally a maskclean up step and may be optional. Further, clean up steps may includeminimizing jogs that are smaller than a threshold value in an outline ofan SRAF so that it can be easily manufactured on a mask.

FIG. 6 compares how OPC corrected SRAFs compare with mask features asdetermined by a mask inversion calculation illustrates one example of adesired target feature such as a square via 200 that is to be printed ona wafer. Surrounding the feature 200 are a number of irregularly shapedoptimized mask features 202 that are generally defined symmetricallyaround the via 200. Each of the optimized mask features 202 isdetermined by a mathematical mask inversion process as referenced above.The optimized mask features 202 are an embodiment of the presentinvention simulated by placing rectangular SRAFs 204 a-204 hsymmetrically around the via 200. Each of the SRAFs 204 a-204 h is sizedsuch that it will not print on the wafer. The SRAFs 204 a-204 h arefragmented and OPC corrected to form the irregularly shaped SRAFslabeled 206 a-206 h. As can be seen, the OPC corrected SRAFs generallymimic the shape of the optimized features 202 as determined by the maskinversion process.

FIG. 7 illustrates a number of OPC corrected SRAFs 210, 212 thatsurround an OPC corrected printing feature 214. Similarly, an OPCcorrected printing feature 220 is surrounded by OPC corrected SRAFs 222,224, 226, 228. Between OPC corrected features 210 and 212 is a portionof the SRAF 211 that is smaller than a minimum size SRAF. Therefore,SRAF 211 may contribute little or nothing to the printability of theprinting feature 214 and be removed from the layout in a clean up step.Similarly, SRAFs that are below a predetermined threshold can be seenbetween SRAFs 222, 224, 226, and 228. In one embodiment of theinvention, any SRAF, such as SRAFs 230, 232 having a size that issmaller than a predetermined minimum can be removed from the layout.Alternatively, the SRAFs can be made to have a minimum size and left inthe layout.

The present invention provides a mechanism for improving theprintability of a mask to print a desired pattern of features on a waferwith a photolithographic system by adding SRAFs to a layout andperforming OPC on the SRAFs. The present invention provides a resultwhich is believed to be similar to that obtainable with a mathematicalmask inversion technique but is significantly quicker to compute andeasier to fabricate on a mask.

Attached as an Appendix is an example of a script that implements thepresent invention within the Calibre® software program from MentorGraphics. Those skilled in the art will recognize that the operationsperformed by the scripts are equally applicable to other OPC softwaretools/engines.

While illustrative embodiments have been illustrated and described, itwill be appreciated that various changes can be made therein withoutdeparting from the scope of the invention. For example, although thedisclosed embodiment is illustrated using SRAFs, it will be appreciatedthat the invention can be used with any non-printing feature added to amask that improves the ability of the mask to create a desired patternon a wafer. For example, phase shifters could be OPC corrected toimprove the printing of a linked edge fragment, as well as negativeSRAFs (i.e., holes in printing features). Therefore, the scope of theinvention is to be determined from the following claims and equivalentsthereof.

1. A computerized method of analyzing data for use in creating a maskthat prints a desired pattern of features via a photolithographicprocess, comprising: obtaining data representative of a number ofpolygons that define a desired pattern of features to be printed via aphotolithographic process; adding data representing one or moresubresolution assist features (SRAFs) to the data that defines one ormore of the printing features; fragmenting the data to define printingfeature edge fragments and SRAF edge fragments; mapping one or more SRAFedge segments to a printing feature edge fragment; determining OPCcorrections for the printing feature edge fragments to improve its edgeplacement error; and determining OPC corrections for one or more of themapped SRAF edge segments to improve a second printing/imagingcharacteristic of the mapped printing feature edge fragment.
 2. Themethod of claim 1, further comprising determining if an OPC correctionof SRAF edge fragments cause an SRAF to print via a photolithographicprocess and, if so, limiting the OPC correction of the SRAF edgefragment to a size that will not print the SRAF via a photolithographicprocess.
 3. The method of claim 2, further comprising limiting thecorrection of the SRAF edge fragment to a size that will not print theSRAF via a photolithographic process.
 4. The method of claim 2, furthercomprising modifying the SRAF so that it will not print via aphotolithographic process.
 5. The method of claim 1, further comprising:determining if an OPC correction of an SRAF edge fragment causes theSRAF to be smaller than a minimum size and, if so, deleting all or aportion of the SRAF that is smaller than the minimum size.
 6. The methodof claim 1, further comprising: determining if an OPC correction of anSRAF edge fragment causes the SRAF to be smaller than a minimum sizeand, if so, limiting the OPC correction of the SRAF edge fragment sothat the SRAF is not smaller than the minimum size.
 7. The method ofclaim 1, wherein the second printing/imaging characteristic is: nominalslope.
 8. The method of claim 1, wherein the second printing/imagingcharacteristic is: nominal image log slope.
 9. The method of claim 1,wherein the second printing/imaging characteristic is: contrast.
 10. Themethod of claim 1, wherein the second printing/imaging characteristicis: out of focus and/or dose edge placement error.
 11. The method ofclaim 1, wherein the second printing/imaging characteristic is: out offocus and/or dose slope.
 12. The method of claim 1, wherein the secondprinting/imaging characteristic is: out of focus and/or dose image logslope.
 13. The method of claim 1, wherein the second printing/imagingcharacteristic is: out of focus and/or dose contrast.
 14. The method ofclaim 1, wherein the second printing/imaging characteristic is: one ormore combinations of nominal (slope, contrast, image log or slope)and/or out of focus/dose (edge placement error, slope, image log slopeor contrast).
 15. The method of claim 1, further comprisingmanufacturing a photolithographic mask using the OPC corrections for theprinting feature edge fragments and the OPC corrections for the one ormore of the mapped SRAF edge segments.
 16. The method of claim 1,further comprising manufacturing an integrated circuit comprising one ormore features created using one or more photolithographic masks createdusing the OPC corrections for the printing feature edge fragments andthe OPC corrections for the one or more of the mapped SRAF edgesegments.
 17. A computerized method of preparing layout data,comprising: obtaining layout data defining a number of features to beprinted via a photolithographic process; defining one or morenon-printing assist features in the layout data; fragmenting thenon-printing assist features to define a number of non-printing edgefragments; mapping one or more of the non-printing edge fragments to anedge of a printing feature; determining OPC corrections for one or moreof the mapped non-printing edge fragments that improve a firstprinting/imaging characteristic of the mapped printing feature edge; anddetermining OPC corrections for the printing feature to improve a secondprinting/imaging characteristic of the mapped printing feature edge. 18.The method of claim 17, wherein the non-printing assist features areSRAFs.
 19. The method of claim 17, wherein the non-printing assistfeatures are phase shifters.
 20. The method of claim 17, wherein thenon-printing assist features are negative SRAFs.
 21. A computer-readablestorage device storing: data representing first OPC corrections forprinting feature edge fragments, and data representing second OPCcorrections for one or more SRAF edge fragments, the first OPCcorrections improving a first printing/imaging characteristic of theprinting feature edge fragments, the second OPC corrections improving asecond printing/imaging characteristic of the printing feature edgefragments.
 22. A computer-readable storage medium storing a number ofinstructions stored thereon that are executable by a computer to performa method of analyzing data for use in creating a mask that prints adesired pattern of features via a photolithographic process, the methodcomprising: obtaining data representative of a number of polygons thatdefine a desired pattern of features to be printed via aphotolithographic process; adding data representing one or moresubresolution assist features (SRAFs) to the data that defines one ormore of the printing features; fragmenting the data to define printingfeature edge fragments and SRAF edge fragments; mapping one or more SRAFedge segments to a printing feature edge fragment; determining OPCcorrections for the printing feature edge fragments to improve its edgeplacement error; and determining OPC corrections for one or more of themapped SRAF edge segments to improve a second printing/imagingcharacteristic of the mapped printing feature edge fragment.
 23. Thecomputer-readable storage medium of claim 22, wherein the method furthercomprises determining if an OPC correction of SRAF edge fragments causean SRAF to print via a photolithographic process and, if so, limitingthe OPC correction of the SRAF edge fragment to a size that will notprint the SRAF via a photolithographic process.
 24. Thecomputer-readable storage medium of claim 23, wherein the method furthercomprises limiting the correction of the SRAF edge fragment to a sizethat will not print the SRAF via a photolithographic process.
 25. Thecomputer-readable storage medium of claim 23, wherein the method furthercomprises modifying the SRAF so that it will not print via aphotolithographic process.
 26. The computer-readable storage medium ofclaim 22, wherein the method further comprises: determining if an OPCcorrection of an SRAF edge fragment causes the SRAF to be smaller than aminimum size and, if so, deleting all or a portion of the SRAF that issmaller than the minimum size.
 27. The computer-readable storage mediumof claim 22, wherein the method further comprises: determining if an OPCcorrection of an SRAF edge fragment causes the SRAF to be smaller than aminimum size and, if so, limiting the OPC correction of the SRAF edgefragment so that the SRAF is not smaller than the minimum size.
 28. Thecomputer-readable storage medium of claim 22, wherein the secondprinting/imaging characteristic is: one or more combinations of nominal(slope, contrast, image log or slope) and/or out of focus/dose (edgeplacement error, slope, image log slope or contrast).
 29. Acomputer-readable storage medium including a number of instructionsstored thereon that are executable by a computer to perform a method ofpreparing layout data, the method comprising: obtaining layout datadefining a number of features to be printed via a photolithographicprocess; defining one or more non-printing assist features in the layoutdata; fragmenting the non-printing assist features to define a number ofnon-printing edge fragments; mapping one or more of the non-printingedge fragments to an edge of a printing feature; determining OPCcorrections for one or more of the mapped non-printing edge fragmentsthat improve a first printing/imaging characteristic of the mappedprinting feature edge; and determining OPC corrections for the printingfeature to improve a second printing/imaging characteristic of themapped printing feature edge.
 30. The computer-readable storage mediumof claim 29, wherein the non-printing assist features are SRAFs.
 31. Thecomputer-readable storage medium of claim 29, wherein the non-printingassist features are phase shifters.
 32. The computer-readable storagemedium of claim 29, wherein the non-printing assist features arenegative SRAFs.
 33. A computer-readable storage medium including anumber of instructions stored thereon that are executable by a computerto perform a method, the method comprising: obtaining layout datadefining a number of features to be printed via a photolithographicprocess, wherein the layout data include printing features andresolution enhancement technique (RET) features, and wherein theprinting features comprise edge fragments; mapping one or more of theRET features to an edge fragment of a printing feature; determiningcorrections for one or more of the mapped RET features that improve afirst printing/imaging characteristic of the mapped printing featureedge; and determining corrections for the printing feature to improve asecond printing/imaging characteristic of the mapped printing featureedge.
 34. The computer-readable storage medium of claim 33, wherein themethod further comprises storing at least a portion of the data for theOPC corrections for the printing feature edge fragments and at least aportion of the data for the OPC corrections for one or more of themapped SRAF edge fragments in a computer-readable storage device.